Silicon Labs : Si50x CMEMS Oscillator Architecture
CMEMS technology is an innovative CMOS + MEMS manufacturing process developed by Silicon Labs, a leading supplier of timing solutions. The term CMEMS is a contraction of the acronyms CMOS and MEMS (microelectromechanical systems). CMEMS technology offers many benefits over traditional oscillator approaches, ranging from scalability, customer-specific programmability and 0-day samples, to long-term reliability and performance. This white paper describes CMEMS process technology, existing hybrid oscillator architectures and the Si501/2/3/4 (Si50x) CMEMS oscillator architecture.